Patent Assignment
Reel/Frame 023943/0534
Assignment of Assignor's Interest
Recorded: 2010-02-17
Pages: 3
Assignee
NUFLARE TECHNOLOGY, INC.
2068-3, OOKA, NUMAZU-SHI, SHIZUOKA, 410-8510, JAPAN
Covered Property
(1)
Charged Particle Beam Writing Method and Charged Particle Beam Writing Apparatus