Patent Assignment
Reel/Frame 024012/0758
Assignment of Assignor's Interest
Recorded: 2010-03-02
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Transfer Apparatus and Substrate Transfer Method