Patent Assignment
Reel/Frame 024021/0351
Assignment of Assignor's Interest
Recorded: 2010-03-03
Pages: 4
Assignor
MUKAWA, TAKAHITO
Executed: 2010-02-04
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Etching Method, Plasma Etching Apparatus and Computer-Readable Storage Medium
Application:
12/716,537 →
Publication:
US 2010/0224587