Patent Assignment
Reel/Frame 024048/0464
Assignment of Assignor's Interest
Recorded: 2010-03-09
Pages: 3
Assignor
IIZUKA, HACHISHIRO
Executed: 2010-02-01
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Shower Head and Plasma Processing Apparatus Having Same