Patent Assignment
Reel/Frame 024112/0039
Assignment of Assignor's Interest
Recorded: 2010-03-19
Pages: 5
Assignee
ADVANCED TECHNOLOGY MATERIALS, INC.
7 COMMERCE DRIVE, DANBURY, CONNECTICUT, 06810-4169
Covered Property
(1)
Method and Apparatus for Enhanced Lifetime and Performance of Ion Source in an Ion Implantation System
Application:
61/308,428 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.