Patent Assignment
Reel/Frame 024158/0823
Assignment of Assignor's Interest
Recorded: 2010-03-30
Pages: 3
Assignor
SASAKI, KAZUO
Executed: 2010-01-14
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Inductively Coupled Plasma Processing Apparatus