Patent Assignment
Reel/Frame 024161/0401
Assignment of Assignor's Interest
Recorded: 2010-03-30
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Surface Cleaning and Selective Deposition of Metal-Containing Cap Layers for Semiconductor Devices