Patent Assignment
Reel/Frame 024166/0554
Assignment of Assignor's Interest
Recorded: 2010-03-31
Pages: 3
Assignors
ARIMA, HIROSHI
Executed: 2010-03-17
YOSHIDA, YUICHI
Executed: 2010-03-17
YAMAMOTO, TARO
Executed: 2010-03-17
YOSHIHARA, KOUSUKE
Executed: 2010-03-17
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Developing Apparatus, Developing Method, and Storage Medium