Patent Assignment
Reel/Frame 024303/0209
Assignment of Assignor's Interest
Recorded: 2010-04-28
Pages: 7
Assignors
DEN BOEF, ARIE JEFFREY
Executed: 2010-04-01
BENSCHOP, JOZEF PETRUS HENRICUS
Executed: 2010-04-06
BRINKHOF, RALPH
Executed: 2010-04-06
MACHT, LUKASZ JERZY
Executed: 2010-04-07
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504-DR, NETHERLANDS
Covered Property
(1)
Level Sensor Arrangement for Lithographic Apparatus and Device Manufacturing Method