Patent Assignment
Reel/Frame 024317/0026
Assignment of Assignor's Interest
Recorded: 2010-04-30
Pages: 2
Assignors
TANABE, JUNICHI
Executed: 2010-03-10
MORIYA, ATSUSHI
Executed: 2010-03-10
ISHIBASHI, KIYOHISA
Executed: 2010-03-10
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus
Application:
12/716,855 →
Publication:
US 2010/0229795