Patent Assignment
Reel/Frame 024405/0573
Assignment of Assignor's Interest
Recorded: 2010-05-18
Pages: 4
Assignor
SHIBAZAKI, YUICHI
Executed: 2010-05-18
Assignee
NIKON CORPORATION
12-1, YURAKUCHO 1-CHOME, CHIYODA-KU, TOKYO 100-8331, JAPAN
Covered Property
(1)
Object Exchange Method, Exposure Method, Carrier System, Exposure Apparatus, and Device Manufacturing Method