Patent Assignment
Reel/Frame 024525/0817
Assignment of Assignor's Interest
Recorded: 2010-06-11
Pages: 2
Assignor
ZIN, KELVIN
Executed: 2010-06-04
Assignee
TOKYO ELECTRON LIMTED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of selectively etching an insulation stack for a metal interconnect