Patent Assignment
Reel/Frame 024590/0869
Assignment of Assignor's Interest
Recorded: 2010-06-24
Pages: 3
Assignor
ERNULT, FRANCK
Executed: 2010-06-08
Assignee
CANON ANELVA CORPORATION
2-5-1, KURIGI, ASAO-KU, KAWASAKI-SHI, KANAGAWA-KEN, JAPAN
Covered Property
(1)
Sputtering Apparatus, Sputter Deposition Method, and Analysis Apparatus