Patent Assignment
Reel/Frame 024709/0309
Assignment of Assignor's Interest
Recorded: 2010-07-20
Pages: 3
Assignor
SUMIYOSHI, YUHEI
Executed: 2010-03-03
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Projection Optical System, Exposure Apparatus, and Device Manufacturing Method