Patent Assignment
Reel/Frame 024760/0370
Assignment of Assignor's Interest
Recorded: 2010-07-29
Pages: 4
Assignors
KAUSHAL, SANJEEV
Executed: 2010-01-29
PATEL, SUKESH JANUBHAI
Executed: 2010-01-28
SUGISHIMA, KENJI
Executed: 2010-01-28
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method and Apparatus for Self-Learning and Self-Improving a Semiconductor Manufacturing Tool