Patent Assignment
Reel/Frame 024845/0956
Assignment of Assignor's Interest
Recorded: 2010-08-17
Pages: 5
Assignors
LU, JHI-CHERNG
Executed: 2010-07-13
LI, JR-HUNG
Executed: 2010-07-13
LI, CHII-HORNG
Executed: 2010-07-13
TSAI, PANG-YEN
Executed: 2010-07-13
CHEN, BING-HUNG
Executed: 2010-07-13
LEE, TZE-LIANG
Executed: 2010-07-13
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method of Temperature Determination for Deposition Reactors