Patent Assignment
Reel/Frame 024887/0542
Assignment of Assignor's Interest
Recorded: 2010-08-25
Pages: 2
Assignors
VENUGOPAL, VIJAYAKUMAR C.
Executed: 2010-07-06
BENJAMIN, NEIL MARTIN PAUL
Executed: 2010-07-06
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods and Arrangements for in-Situ Process Monitoring and Control for Plasma Processing Tools