Patent Assignment
Reel/Frame 025068/0803
Assignment of Assignor's Interest
Recorded: 2010-09-23
Pages: 5
Assignors
GREGERSON, BARRY
Executed: 2010-07-20
ADAMS, MICHAEL SHAWN
Executed: 2010-07-13
STEFFENS, JASON TODD
Executed: 2010-07-13
Assignee
ENTEGRIS, INC.
129 CONCORD ROAD, BELLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Methods and Apparatuses for Large Diameter Wafer Handling
Application:
12/812,729 →
Publication:
US 2011/0005967