Patent Assignment
Reel/Frame 025090/0842
Assignment of Assignor's Interest
Recorded: 2010-10-05
Pages: 2
Assignor
SATO, MASANOBU
Executed: 2010-09-16
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-CHO 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO, 6028585, JAPAN
Covered Property
(1)
Substrate Cleaning Method and Substrate Cleaning Apparatus
Application:
12/936,427 →
Publication:
US 2011/0031326