Patent Assignment
Reel/Frame 025106/0253
Assignment of Assignor's Interest
Recorded: 2010-10-07
Pages: 5
Assignors
OGAWA, YOSHIHIRO
Executed: 2010-09-13
KOIDE, TATSUHIKO
Executed: 2010-09-13
KIMURA, SHINSUKE
Executed: 2010-09-13
OKUCHI, HISASHI
Executed: 2010-09-09
TOMITA, HIROSHI
Executed: 2010-09-09
Assignee
KABUSHIKI KAISHA TOSHIBA
1-1, SHIBAURA 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Apparatus and Method of Treating Surface of Semiconductor Substrate
Application:
12/886,427 →
Publication:
US 2011/0143541