Patent Assignment
Reel/Frame 025143/0546
Assignment of Assignor's Interest
Recorded: 2010-10-15
Pages: 6
Assignors
OHMI, TADAHIRO
Executed: 2010-09-21
TERAMOTO, AKINOBU
Executed: 2010-09-21
HASEBE, RUI
Executed: 2010-10-05
MIYASHITA, MASAYUKI
Executed: 2010-10-05
Assignees
NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY
1-1, KATAHIRA 2-CHOME, AOBA-KU, SENDAI-SHI, MIYAGI, 980-8577, JAPAN
STELLA CHEMIFA CORPORATION
NM PLAZA MIDOSUJI, 6-3, AWAJIMACHI 3-CHOME,, CHUO-KU, OSAKA-SHI,, OSAKA, 541-0047, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device and Method for Cleaning Semiconductor Substrate
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.