Patent Assignment
Reel/Frame 025230/0780
Assignment of Assignor's Interest
Recorded: 2010-11-01
Pages: 7
Assignors
FUJIMOTO, HIROSHI
Executed: 2010-04-12
SAKATA, KOICHI
Executed: 2010-04-12
SAIKI, KAZUAKI
Executed: 2010-10-26
OHTOMO, TAKESHI
Executed: 2010-10-26
Assignees
NATIONAL UNIVERSITY CORPORATION YOKOHAMA NATIONAL UNIVERSITY
79-1, TOKIWADAI, HODOGAYA-KU, YOKOHAMA-SHI, KANAGAWA 240-8501, JAPAN
NIKON CORPORATION
12-1, YURAKUCHO 1-CHOME, CHIYODA-KU, TOKYO 100-8331, JAPAN
Covered Property
(1)
Drive Control Method, Drive Control Apparatus, Stage Control Method, Stage Control Apparatus, Exposure Method, Exposure Apparatus and Measuring Apparatus
Application:
12/719,457 →
Publication:
US 2011/0046795