Patent Assignment
Reel/Frame 025303/0458
Assignment of Assignor's Interest
Recorded: 2010-11-11
Pages: 9
Assignors
KAIM, ROBERT
Executed: 2010-10-16
SWEENEY, JOSEPH D.
Executed: 2010-10-28
AVILA, ANTHONY M.
Executed: 2010-10-31
RAY, RICHARD S.
Executed: 2010-10-23
Assignee
ADVANCED TECHNOLOGY MATERIALS, INC.
7 COMMERCE DRIVE, DANBURY, CONNECTICUT, 06810-4169
Covered Property
(1)
Method and Apparatus for Enhanced Lifetime and Performance of Ion Source in an Ion Implantation System
Application:
61/390,715 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.