Patent Assignment
Reel/Frame 025326/0801
Assignment of Assignor's Interest
Recorded: 2010-11-05
Pages: 2
Assignors
YOSHIKAWA, TADAYOSHI
Executed: 2010-10-12
TAMAGAWA, KOKI
Executed: 2010-10-12
WATANABE, NAOTO
Executed: 2010-10-12
Assignee
SHINKO ELECTRIC INDUSTRIES CO., LTD.
80, OSHIMADA-MACHI,, NAGANO-SHI, NAGANO, 381-2287, JAPAN
Covered Property
(1)
Substrate for Electrostatic Chuck and Electrostatic Chuck