Patent Assignment
Reel/Frame 025462/0722
Assignment of Assignor's Interest
Recorded: 2010-12-07
Pages: 8
Assignors
PAPASOULIOTIS, GEORGE D.
Executed: 2010-11-19
SINGH, VIKRAM
Executed: 2010-11-17
YIN, HEYUN
Executed: 2010-11-15
MAYNARD, HELEN L.
Executed: 2010-11-05
GODET, LUDOVIC
Executed: 2010-11-11
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Technique for Processing a Substrate Having a Non-Planar Surface