Patent Assignment
Reel/Frame 025614/0747
Assignment of Assignor's Interest
Recorded: 2011-01-10
Pages: 3
Assignors
LIU, HUA-YU
Executed: 2011-01-04
CHEN, LUOQI
Executed: 2011-01-04
CHEN, HONG
Executed: 2011-01-04
LI, ZHI-PAN
Executed: 2011-01-04
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, 5504 DR VELDHOVEN, NETHERLANDS
Covered Property
(1)
Selection of Optimum Patterns in a Design Layout Based on Diffraction Signature Analysis