Assignment of Assignor's Interest

Recorded: 2011-01-21 Pages: 5

Assignors

SAENGER, INGO

Executed: 2011-01-21

FIOLKA, DAMIAN

Executed: 2010-12-27

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Optical System, in Particular of a Microlithographic Projection Exposure Apparatus

Patent: 8,098,366 →

Application: 12/968,781 →

Publication: US 2011/0149261