Patent Assignment
Reel/Frame 025832/0642
Assignment of Assignor's Interest
Recorded: 2011-02-18
Received: 2011-02-18
Pages: 7
Assignors
LEE, WILLIAM D.
Executed: 2011-01-20
TIEGER, DANIEL R.
Executed: 2011-01-20
HSIEH, TSEH-JEN
Executed: 2011-02-04
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MA, 01915, UNITED STATES
Covered Property
(1)
Carbon Implantation Process and Carbon Ion Precursor Composition
Application:
13/010,397 →