Patent Assignment
Reel/Frame 025851/0968
Assignment of Assignor's Interest
Recorded: 2011-02-23
Pages: 2
Assignor
PATRA, MICHAEL
Executed: 2011-02-11
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical Raster Element, Optical Integrator and Illumination System of a Microlithographic Projection Exposure Apparatus