Patent Assignment
Reel/Frame 025867/0383
Assignment of Assignor's Interest
Recorded: 2011-02-25
Pages: 3
Assignee
TDK CORPORATION
1-13-1, NIHONBASHI, CHUO-KU, TOKYO, 103-8272, JAPAN
Covered Property
(1)
Substrate Storage Pod with Replacement Function of Clean Gas
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.