Security Agreement

Recorded: 2011-03-03 Pages: 8

Assignor

BROOKS INSTRUMENT LLC

Executed: 2011-02-28

Assignee

1290 AVENUE OF THE AMERICAS, NEW YORK, NEW YORK, 10104

Covered Properties (6)

Flow Sensor Signal Conversion

Patent: 7,720,617 →

Application: 11/856,585 →

Publication: US 2008/0000283

Multi-Gas Flow Device

Patent: 8,068,999 →

Application: 12/578,276 →

Publication: US 2010/0030388

Multi-Gas Flow Device

Patent: 8,010,303 →

Application: 12/578,296 →

Publication: US 2010/0070206

Monolithic Vacuum Manometer Utilizing Electrostatic Interference as a Means of Detection

Patent: 8,141,430 →

Application: 12/827,531 →

Publication: US 2011/0000303

Advanced Feed-Forward Valve-Control for a Mass Flow Controller

Application: 61/418,827 →

Self-Heated Mems Based Capacitance Diaphragm Gauge

Application: 61/421,878 →