Patent Assignment
Reel/Frame 025906/0613
Assignment of Assignor's Interest
Recorded: 2011-03-06
Pages: 3
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical System with Aperture Device Having Plurality of Aperture Elements