Patent Assignment
Reel/Frame 025954/0141
Assignment of Assignor's Interest
Recorded: 2011-03-15
Pages: 4
Assignors
HORII, SADAYOSHI
Executed: 2011-01-12
OGAWA, ARITO
Executed: 2011-01-12
ITATANI, HIDEHARU
Executed: 2011-01-12
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Semiconductor Device, Method of Manufacturing Semiconductor Device, and Substrate Processing Apparatus
Application:
12/984,018 →
Publication:
US 2011/0163452