Patent Assignment
Reel/Frame 025966/0774
Assignment of Assignor's Interest
Recorded: 2011-03-16
Pages: 3
Assignors
TSAI, MIN-CHUN
Executed: 2001-02-03
CHEN, BEEN-DER
Executed: 2011-02-03
LU, YEN-WEN
Executed: 2011-02-03
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Enhancing Signal Strength for Improved Generation and Placement of Model-Based Sub-Resolution Assist Features (Mb-Sraf)