Assignment of Assignor's Interest

Recorded: 2011-03-18 Pages: 10

Assignors

BALL-DIFAZIO, DOREEN J.

Executed: 2011-02-04

JOHNSON, WILLIAM L.

Executed: 2011-02-08

SULLIVAN, ROBERT P.

Executed: 2011-02-08

MORRIS, RONALD N.

Executed: 2011-02-07

Assignee

BROOKS AUTOMATION, INC.

15 ELIZABETH DRIVE, CHELMSFORD, MASSACHUSETTS, 01824

Covered Property (1)

Method and Apparatus for Providing Temperature Control to a Cryopump

Application: 12/981,806 →

Publication: US 2011/0162391