Patent Assignment
Reel/Frame 025991/0969
Assignment of Assignor's Interest
Recorded: 2011-03-21
Pages: 6
Assignors
KAUSHAL, SANJEEV
Executed: 2011-03-10
SUGISHIMA, KENJI
Executed: 2011-03-10
PATEL, SUKESH JANUBHAI
Executed: 2011-03-17
FILMAN, ROBERT
Executed: 2011-03-17
POLAK, WOLFGANG
Executed: 2011-03-17
WOLFE, ORION
Executed: 2011-03-17
BURGER, JESSIE
Executed: 2011-03-17
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Biologically Based Chamber Matching