Patent Assignment
Reel/Frame 026041/0451
Assignment of Assignor's Interest
Recorded: 2011-03-29
Pages: 3
Assignors
CHANDRASHEKAR, ANAND
Executed: 2011-02-04
HUMAYUN, RAASHINA
Executed: 2011-02-04
DANEK, MICHAL
Executed: 2011-02-04
FELLIS, AARON R.
Executed: 2011-02-04
CHANG, SEAN
Executed: 2011-02-04
Assignee
NOVELLUS SYSTEMS, INC.
4000 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Depositing Tungsten into High Aspect Ratio Features