Patent Assignment
Reel/Frame 026098/0206
Assignment of Assignor's Interest
Recorded: 2011-04-08
Pages: 2
Assignor
MANN, HANS-JUERGEN
Executed: 2011-03-25
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Reflective Optical Element, Projection System, and Projection Exposure Apparatus