Patent Assignment
Reel/Frame 026112/0913
Assignment of Assignor's Interest
Recorded: 2011-04-12
Pages: 5
Assignors
YI, SANG IN
Executed: 2008-08-11
CHAN, KELVIN
Executed: 2008-08-07
NOWAK, THOMAS
Executed: 2008-08-08
DEMOS, ALEXANDROS T.
Executed: 2008-08-11
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Superimposition of Rapid Periodic and Extensive Post Multiple Substrate Uv-Ozone Clean Sequences for High Throughput and Stable Substrate to Substrate Performance