Patent Assignment
Reel/Frame 026125/0488
Assignment of Assignor's Interest
Recorded: 2011-04-14
Pages: 8
Assignors
MAHNKE, GUIDO
Executed: 2011-04-06
STOCK, BERNHARD
Executed: 2011-04-12
HANIKA, MARKUS
Executed: 2011-03-28
FUELLER, FERDINAND
Executed: 2011-04-12
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Apparatus and Method for Detecting a State of a Deposition Apparatus