Patent Assignment
Reel/Frame 026130/0363
Assignment of Assignor's Interest
Recorded: 2011-04-14
Pages: 5
Assignors
KIM, NAM-GUN
Executed: 2011-01-14
KIM, YOONJAE
Executed: 2011-01-14
CHO, SUNGIL
Executed: 2011-01-14
Assignee
SAMSUNG ELECTRONICS CO., LTD.
416 MAETAN-DONG, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Methods for Patterning Microelectronic Devices Using Two Sacrificial Layers