Patent Assignment
Reel/Frame 026138/0252
Assignment of Assignor's Interest
Recorded: 2011-04-15
Pages: 3
Assignors
PALAGASHVILI, DAVID
Executed: 2011-04-05
WILLWERTH, MICHAEL D.
Executed: 2011-04-05
LIU, JINGBAO
Executed: 2011-03-30
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Apparatus for Controlling the Flow of a Gas in a Process Chamber