Patent Assignment
Reel/Frame 026199/0821
Assignment of Assignor's Interest
Recorded: 2011-04-29
Pages: 3
Assignors
SATO, JUN
Executed: 2011-01-26
KIKAMA, EIJI
Executed: 2011-01-26
TOIYA, MASATAKA
Executed: 2011-01-26
SHIBATA, TETSUYA
Executed: 2011-01-26
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Formation Method, Film Formation Apparatus, and Method for Using Film Formation Apparatus