Patent Assignment
Reel/Frame 026266/0484
Assignment of Assignor's Interest
Recorded: 2011-05-12
Pages: 2
Assignor
MANN, HANS-JUERGEN
Executed: 2011-03-15
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Illumination Optical System for Projection Lithography