Patent Assignment
Reel/Frame 026326/0822
Assignment of Assignor's Interest
Recorded: 2011-05-23
Pages: 3
Assignor
SINGH, HARMEET
Executed: 2011-05-18
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Vacuum Seal Arrangement Useful in Plasma Processing Chamber