Patent Assignment
Reel/Frame 026399/0786
Assignment of Assignor's Interest
Recorded: 2011-06-07
Pages: 3
Assignors
ISHII, KAZUNARI
Executed: 2011-06-03
IIJIMA, TOSHIHIKO
Executed: 2011-06-03
AKIYAMA, SHUJI
Executed: 2011-06-03
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Wafer Chuck Inclination Correcting Method and Probe Apparatus