Patent Assignment
Reel/Frame 026430/0806
Assignment of Assignor's Interest
Recorded: 2011-06-13
Pages: 7
Assignors
LI, CHUNG-HSUN
Executed: 2011-04-18
VAN HAREN, RICHARD JOHANNES FRANCISCUS
Executed: 2011-04-22
MUSA, SAMI
Executed: 2011-05-26
DECKERS, DAVID
Executed: 2011-04-26
WU, SHUN-DER
Executed: 2011-04-18
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Production of an Alignment Mark
Application:
13/075,980 →
Publication:
US 2011/0273685