Patent Assignment
Reel/Frame 026431/0331
Assignment of Assignor's Interest
Recorded: 2011-06-13
Pages: 4
Assignors
NAKAMORI, MITSUNORI
Executed: 2011-05-18
UCHIDA, NORITAKA
Executed: 2011-05-19
ORII, TAKEHIKO
Executed: 2011-05-27
MIYAZAKI, TAKANORI
Executed: 2011-05-23
MOURI, NOBUHIKO
Executed: 2011-05-19
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Apparatus for Polishing Rear Surface of Substrate, System for Polishing Rear Surface of Substrate, Method for Polishing Rear Surface of Substrate and Recording Medium Having Program for Polishing Rear Surface of Substrate