Patent Assignment
Reel/Frame 026462/0673
Assignment of Assignor's Interest
Recorded: 2011-06-15
Pages: 3
Assignors
MORITA, SATOSHI
Executed: 2011-06-02
OGATA, NOBUHIRO
Executed: 2011-06-03
NAGAMINE, SHUICHI
Executed: 2011-06-03
KIYOTA, KENJI
Executed: 2011-06-02
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Liquid Processing Apparatus, Liquid Processing Method, and Recording Medium Having Computer Program for Performing the Same Method