Patent Assignment
Reel/Frame 026538/0026
Assignment of Assignor's Interest
Recorded: 2011-07-01
Pages: 5
Assignors
WAITE, ANDREW
Executed: 2011-06-29
KIM, YOUNKI
Executed: 2011-06-29
TODOROV, STANISLAV
Executed: 2011-06-29
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Method to Modify the Shape of a Cavity Using Angled Implantation